In-plane Observations of RF-sputtered LiNbO 3 Thin Films...

Japanese Journal of Applied Physics 1996 / 12 Vol. 35; Iss. Part 2, No

In-plane Observations of RF-sputtered LiNbO 3 Thin Films Using an Energy Dispersive Total-Reflection X-Ray Diffractometer*1

Nishida, Takashi, Ishida, Kenji, Horiuchi, Toshihisa, Shiosaki, Tadashi, Matsushige, Kazumi
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Volume:
35
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.35.L1699
Date:
December, 1996
File:
PDF, 575 KB
1996
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