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Atmosphere Dependence in Phosphorus Pileup at the Silicon Surface during Isochronal Heating
Sato, Yoshiyuki, Itsumi, ManabuVolume:
36
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.1047
Date:
March, 1997
File:
PDF, 403 KB
1997