Mechanism for Desorption of...

Japanese Journal of Applied Physics 1997 / 3 Vol. 36; Iss. Part 1, No

Mechanism for Desorption of S i F 4 from an S i O 2 Film Surface in HF Solutions

Oku, Tomoki, Sato, Kazuhiko, Otsubo, Mutsuyuki
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Volume:
36
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.1374
Date:
March, 1997
File:
PDF, 1.03 MB
1997
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