Excimer Laser Induced Crystallization of Polycrystalline...

Japanese Journal of Applied Physics 1997 / 3 Vol. 36; Iss. Part 1, No

Excimer Laser Induced Crystallization of Polycrystalline Silicon Films by Adding Oxygen

Choi, Hong-Seok, Jun, Jae-Hong, Park, Cheol-Min, Min, Byung-Hyuk, Han, Min-Koo
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Volume:
36
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.1473
Date:
March, 1997
File:
PDF, 1.08 MB
1997
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