X-Ray Rocking Curve Study of the Strain Profile Formed by...

Japanese Journal of Applied Physics 1997 / 12 Vol. 36; Iss. Part 1, No

X-Ray Rocking Curve Study of the Strain Profile Formed by MeV Ion Implantation into (111) Silicon Wafers

Kuribayashi, Masaru, Takumi, Katsuhiko, Inoue, Akira, Tanaka, Hiroyuki, Tomita, Hirofumi, Jiang, Yi-Chao, Katoh, Hiroyuki, Ishida, Kohtaro, Aizawa, Kazuya, Okayasu, Satoru, Tomimitsu, Hiroshi, Kazumat
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Volume:
36
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.7296
Date:
December, 1997
File:
PDF, 1.02 MB
1997
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