Measurement of Carbon Atom Density in High Density Plasma...

Japanese Journal of Applied Physics 1997 / 7 Vol. 36; Iss. Part 2, No

Measurement of Carbon Atom Density in High Density Plasma Process

Ito, Haruhiko, Ikeda, Masanobu, Ito, Masafumi, Hori, Masaru, Takeo, Takashi, Hattori, Hajime, Goto, Toshio
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Volume:
36
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.L880
Date:
July, 1997
File:
PDF, 528 KB
1997
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