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Upper-bound Frequency for Measuring mm-Wave-Band Dielectric Characteristics of Thin Films on Semiconductor Substrates
Ikuta, Kenji, Umeda, Yohtaro, Ishii, YasunobuVolume:
37
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.37.210
Date:
January, 1998
File:
PDF, 905 KB
1998