Transmission Electron Microscope Sample Shape Optimization for Energy Dispersive X-Ray Spectroscopy Using the Focused Ion Beam Technique
Saito, Masakazu, Aoyama, Takashi, Hashimoto, Takahito, Isakozawa, ShigetoVolume:
37
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.37.355
Date:
January, 1998
File:
PDF, 1.24 MB
1998