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Improvement of Photo-Misalignment in Patterned Wafer Bonding Process for Silicon-on-Insulator Device
Lee, Ki-Hong, Cha, Gi-Ho, Bae, Geum-Jong, Lee, Kyung-Wook, Kim, Il-Kwon, Lee, Sang In, Lee, Moon YongVolume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.38.3487
Date:
June, 1999
File:
PDF, 462 KB
english, 1999