Studies on Defect Inspectability and Printability Using Programmed-Defect X-Ray Mask
Watanabe, Hiroshi, Kikuchi, Yukiko, Marumoto, Kenji, Matsui, Yasuji, Yabe, Hideki, Aya, Sunao, Okada, Ikuo, Takeuchi, NobuyukiVolume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.38.7084
Date:
December, 1999
File:
PDF, 959 KB
english, 1999