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Surface Microroughness Observed during Wet Etching of Silicon Dioxide with High Electric Field Stress
Yamabe, Kikuo, Kai, Liao, Murata, MasahideVolume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.38.L1453
Date:
December, 1999
File:
PDF, 307 KB
english, 1999