Optical Characterization of Gate Oxide Charging Damage by Photoreflectance Spectroscopy
Agata, Masashi, Wada, Hideo, Maida, Osamu, Eriguchi, Koji, Fujimoto, Akira, Kanashima, Takeshi, Okuyama, MasanoriVolume:
39
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.39.2040
Date:
April, 2000
File:
PDF, 130 KB
english, 2000