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Optimum Conditions for Novel One-Step Cleaning Method for Pre-Gate Oxide Cleaning Using Robust Design Methodology
Pan, Tung Ming, Lei, Tan Fu, Chao, Tien Sheng, Liaw, Ming Chi, Lu, Chih PengVolume:
39
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.39.5805
Date:
October, 2000
File:
PDF, 51 KB
english, 2000