Thin-Film Transistors with Polycrystalline Silicon Films...

Japanese Journal of Applied Physics 2000 / 1 Vol. 39; Iss. Part 2, No

Thin-Film Transistors with Polycrystalline Silicon Films Prepared by Two-Step Rapid Thermal Annealing

Cheng, Huang-Chung, Huang, Chun-Yao, Wang, Fang-Shing, Lin, Kuen-Hsien, Tarntair, Fu-Gow
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Volume:
39
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.39.L19
Date:
January, 2000
File:
PDF, 531 KB
english, 2000
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