Fabrication of High-Accuracy Microtranslation Table for...

Japanese Journal of Applied Physics 2003 / 6 Vol. 42; Iss. Part 1, No

Fabrication of High-Accuracy Microtranslation Table for Near-Field Optical Data Storage Actuated by Inverted Scratch-Drive Actuators

Kanamori, Yoshiaki, Yahagi, Hiroto, Ono, Takahito, Sasaki, Minoru, Hane, Kazuhiro
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Volume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.42.4074
Date:
June, 2003
File:
PDF, 265 KB
english, 2003
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