SiO Mass Spectrometry and Si-2p Photoemission Spectroscopy...

Japanese Journal of Applied Physics 2003 / 7 Vol. 42; Iss. Part 1, No

SiO Mass Spectrometry and Si-2p Photoemission Spectroscopy for the Study of Oxidation Reaction Dynamics of Si(001) Surface by Supersonic O 2 Molecular Beams under 1000 K

Teraoka, Yuden, Yoshigoe, Akitaka, Moritani, Kousuke
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Volume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.42.4671
Date:
July, 2003
File:
PDF, 164 KB
english, 2003
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