Effects of Post-Oxygen Plasma Treatment on Pt/(Ba,Sr)TiO...

Japanese Journal of Applied Physics 2003 / 2 Vol. 42; Iss. Part 1, No

Effects of Post-Oxygen Plasma Treatment on Pt/(Ba,Sr)TiO 3 /Pt Capacitors at Low Substrate Temperatures

Shye, Der-Chi, Hwang, Chuan-Chou, Lai, Ming-Jiunn, Jaing, Cheng-Chung, Chen, Jyh-Shin, Huang, Stewart, Juang, Miin-Horng, Chiou, Bi-Shiou, Cheng, Huang-Chung
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.42.549
Date:
February, 2003
File:
PDF, 168 KB
english, 2003
Conversion to is in progress
Conversion to is failed