Preparation and Characterization of RuO x...

Japanese Journal of Applied Physics 2004 / 5 Vol. 43; Iss. 5A

Preparation and Characterization of RuO x Thin Films by Liquid Delivery Metalorganic Chemical Vapor Deposition

Kim, Kyoung-Won, Kim, Nam-Soo, Lee, Hyung-Gyoo, Kim, Yeong-Seuk, Kang, Hee-Jae, Park, Ju-Chul, Joung, Yang-Hee, Kang, Seong-Jun
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Volume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.43.2667
Date:
May, 2004
File:
PDF, 1.00 MB
english, 2004
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