Low-Temperature Deposition of Pb(Zr,Ti)O 3...

Japanese Journal of Applied Physics 2004 / 8 Vol. 43; Iss. 8A

Low-Temperature Deposition of Pb(Zr,Ti)O 3 Thin Films on Si Substrates Using Ba(Mg 1/3 Ta 2/3 )O 3 as Buffer Layer

Chu, Ying-Hao, Liang, Chen-Wei, Lin, Su-Jien, Liu, Kuo-Shung, Lin, I-Nan
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Volume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.43.5409
Date:
August, 2004
File:
PDF, 456 KB
english, 2004
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