Dependence of Time-Dependent Dielectric Breakdown Lifetime on the Structure in Cu Metallization
Noguchi, Junji, Saito, Tatsuyuki, Maruyama, Hiroyuki, Kubo, Maki, Ohashi, Naofumi, Takeda, Ken-ichiVolume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.43.7405
Date:
November, 2004
File:
PDF, 255 KB
english, 2004