Dependence of Nanotopography Impact on Abrasive Size and...

Japanese Journal of Applied Physics 2004 / 01 Vol. 43; Iss. 1A/B

Dependence of Nanotopography Impact on Abrasive Size and Surfactant Concentration in Ceria Slurry for Shallow Trench Isolation Chemical Mechanical Polishing

Kang, Hyun-Goo, Katoh, Takeo, Lee, Won-Mo, Paik, Ungyu, Park, Jea-Gun
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Volume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.43.L1
Date:
January, 2004
File:
PDF, 177 KB
english, 2004
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