Contactless Characterization of Fixed Charges in HfO 2 Thin Film from Photoreflectance
Sohgawa, Masayuki, Yoshida, Masato, Naoyama, Takuji, Tada, Taizou, Ikeda, Kouji, Kanashima, Takeshi, Fujimoto, Akira, Okuyama, MasanoriVolume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.44.2409
Date:
April, 2005
File:
PDF, 182 KB
english, 2005