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Effects of Sputtering Parameters on the Formation of Single-Oriented (002) Ti Film on Si
Mireba, Kazuhiro, Shinkai, Satoko, Yanagisawa, Hideto, Sasaki, Katsutaka, Abe, YoshioVolume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.44.375
Date:
January, 2005
File:
PDF, 103 KB
english, 2005