Actinic Mask Inspection Using an EUV Microscope...

Japanese Journal of Applied Physics 2005 / 7 Vol. 44; Iss. 7B

Actinic Mask Inspection Using an EUV Microscope –Preparation of a Mirau Interferometer for Phase-Defect Detection–

Hamamoto, Kazuhiro, Tanaka, Yuzuru, Kawashima, Hirotake, Lee, Seung Yoon, Hosokawa, Nobuyuki, Sakaya, Noriyuki, Hosoya, Morio, Shoki, Tsutomu, Watanabe, Takeo, Kinoshita, Hiroo
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Volume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.44.5474
Date:
July, 2005
File:
PDF, 319 KB
english, 2005
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