Deposited Energy Dependence of Surface Roughness of Polymethylmethacrylate Irradiated by Electron Beam
Kotera, Masatoshi, Niu, Hirohisa, Hosokawa, Taro, Yagura, KeiVolume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.44.5595
Date:
July, 2005
File:
PDF, 274 KB
english, 2005