Investigation of Quartz Side Wall Influence on Radial...

Japanese Journal of Applied Physics 2006 / 4 Vol. 45; Iss. 4A

Investigation of Quartz Side Wall Influence on Radial Plasma Density Profiles in Low-Pressure Surface Wave Plasma Source

Širý, Milan, Sakata, Shinichiro, Terebessy, Tibor, Kando, Masashi
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Volume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.2749
Date:
April, 2006
File:
PDF, 327 KB
english, 2006
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