Determination of Effective Nanoindentation Range for Hard (Ti,Al)N Thin Film
Jeong, Seong-Min, Shum, Po-Wan, Shen, Yao-Gen, Li, Kwok-Yan, Mai, Yiu-Wing, Lee, Hong-LimVolume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.6411
Date:
August, 2006
File:
PDF, 196 KB
english, 2006