Control Performance of Interactions between Reactive Plasma Jet and Substrate
Nishiyama, Hideya, Sato, Takehiko, Niikura, Shota, Chiba, Genta, Takana, HidemasaVolume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.8085
Date:
October, 2006
File:
PDF, 1023 KB
english, 2006