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Nanoimprinting Using Liquid-Phase Hydrogen Silsesquioxane
Nakamatsu, Ken-ichiro, Matsui, ShinjiVolume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.L546
Date:
May, 2006
File:
PDF, 209 KB
english, 2006