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Effects of Plasma Molding on Feature Profile of Silicon Micro-Electro-Mechanical Systems through Flux Ion Velocity Distributions in Two-Frequency Capacitively Coupled Plasma in SF 6 /O 2
Hamaoka, Fukutaro, Yagisawa, Takashi, Makabe, ToshiakiVolume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.3059
Date:
May, 2007
File:
PDF, 302 KB
english, 2007