Electron Trap Characteristics of Silicon Rich Silicon...

Japanese Journal of Applied Physics 2007 / 5 Vol. 46; Iss. 5B

Electron Trap Characteristics of Silicon Rich Silicon Nitride Thin Films

Mine, Toshiyuki, Fujisaki, Koji, Ishida, Takeshi, Shimamoto, Yasuhiro, Yamada, Renichi, Torii, Kazuyoshi
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Volume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.3206
Date:
May, 2007
File:
PDF, 324 KB
english, 2007
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