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Preparation of Thin-Film Capacitor with High Reliability by Anodization of Zr–Al Alloy Film
Mikuni, Naohiro, Shibata, Tomoharu, Shinkai, Satoko, Sasaki, Katsutaka, Yanagisawa, Hideto, Yamane, Misao, Abe, YoshioVolume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.5249
Date:
August, 2007
File:
PDF, 373 KB
english, 2007