Hydrogen Modulation-Doped Structures to Improve Crystalline...

Japanese Journal of Applied Physics 2007 / 12 Vol. 46; Iss. 12

Hydrogen Modulation-Doped Structures to Improve Crystalline Fraction of Polycrystalline Silicon Films Prepared by Excimer Laser Annealing at Low Energy Densities

Heya, Akira, Matsuo, Naoto, Serikawa, Tadashi, Kawamoto, Naoya
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Volume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.7858
Date:
December, 2007
File:
PDF, 185 KB
english, 2007
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