Experimental Study on Mobility Universality in (100)...

Japanese Journal of Applied Physics 2007 / 5 Vol. 46; Iss. No. 20

Experimental Study on Mobility Universality in (100) Ultrathin Body nMOSFETs with SOI Thickness of 5 nm

Shimizu, Ken, Tsutsui, Gen, Hiramoto, Toshiro
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Volume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.L480
Date:
May, 2007
File:
PDF, 267 KB
english, 2007
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