Application of Al 2 O 3 Film Prepared by Treatment in Hot Deionized Water
Asai, Makoto, Goto, RyuheiVolume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.47.1517
Date:
March, 2008
File:
PDF, 242 KB
english, 2008