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Distortion Measurement of Multi-Finger Transistor Using Split Higher-Order Laue Zone Lines Analysis
Uesugi, Fumihiko, Yamazaki, Takashi, Kuramochi, Koji, Hashimoto, Iwao, Kojima, Kenji, Takeno, ShiroVolume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.47.3709
Date:
May, 2008
File:
PDF, 278 KB
english, 2008