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Analysis of Deep-Level Defects on Proton Implanted Polycrystalline Silicon Thin Films Using Photoinduced Current Transient Spectroscopy
Kim, Won-Sik, Kim, Do Hyoung, Kwak, Dong Wook, Lee, Dong Wha, Lee, Yeon Hwan, Cho, Hoon YoungVolume:
49
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.49.125802
Date:
December, 2010
File:
PDF, 683 KB
english, 2010