Determination of Impurity Distribution in Silicon Epitaxial...

Determination of Impurity Distribution in Silicon Epitaxial Film Using MOS Capacitor

Nishi, Yoshio, Konaka, Masami
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Volume:
5
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.5.1116
Date:
November, 1966
File:
PDF, 125 KB
1966
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