Effectiveness of Dimethyl Carbonate and Dipivaloyl Methane...

Japanese Journal of Applied Physics 2011 / 5 Vol. 50; Iss. 5

Effectiveness of Dimethyl Carbonate and Dipivaloyl Methane Chemicals for Internal Repair of Plasma-Damaged Low- k Films

Nagano, Shuji, Sakoda, Kaoru, Hasaka, Satoshi, Kobayashi, Kiyoteru
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Volume:
50
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.50.05EB08
Date:
May, 2011
File:
PDF, 1.23 MB
english, 2011
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