Langasite Crystal Microbalance for Development of Reactive...

Japanese Journal of Applied Physics 2011 / 9 Vol. 50; Iss. 9

Langasite Crystal Microbalance for Development of Reactive Surface Preparation of Silicon Carbide Film Deposition from Monomethylsilane Gas

Habuka, Hitoshi, Kote, Ken-Ichi
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Volume:
50
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.50.096505
Date:
September, 2011
File:
PDF, 440 KB
english, 2011
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