Extreme Ultraviolet Resist Fabricated Using Water...

Japanese Journal of Applied Physics 2011 / 11 Vol. 50

Extreme Ultraviolet Resist Fabricated Using Water Wheel-Like Cyclic Oligomer with Pendant Adamantyl Ester Groups

Seki, Hiroyuki, Kudo, Hiroto, Oizumi, Hiroaki, Itani, Toshiro, Nishikubo, Tadatomi
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Volume:
50
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.50.121602
Date:
November, 2011
File:
PDF, 588 KB
english, 2011
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