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Investigation of the Galvanic Effect between RuN Barriers and Cu Seed Layers
Wu, Chia-Yang, Lee, Wen-Hsi, Chang, Shih-Chieh, Wang, Ying-LangVolume:
50
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.50.121803
Date:
November, 2011
File:
PDF, 886 KB
english, 2011