Current Induced Grain Growth of Electroplated Copper Film

Japanese Journal of Applied Physics 2012 / 5 Vol. 51

Current Induced Grain Growth of Electroplated Copper Film

Razak, Liyana, Yamaguchi, Takamasa, Akahori, Seishi, Hashimoto, Hideki, Ueno, Kazuyoshi
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Volume:
51
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.51.05EA04
Date:
May, 2012
File:
PDF, 1.65 MB
english, 2012
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