Characterization of Fogging and Develop-Loading Effects in...

Japanese Journal of Applied Physics 2012 / 6 Vol. 51

Characterization of Fogging and Develop-Loading Effects in Electron-Beam Direct-Writing Technology

Kon, Jun-ichi, Kojima, Yoshinori, Takahashi, Yasushi, Maruyama, Takashi, Sugatani, Shinji
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Volume:
51
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.51.06FC04
Date:
June, 2012
File:
PDF, 692 KB
english, 2012
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