SiGe Synthesis by Ge Ion Implantation
Yuk, Hyung-Sang, Oh, Jin-Heon, Lim, Kee-JoeVolume:
51
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.51.09MF03
Date:
September, 2012
File:
PDF, 1.04 MB
english, 2012