A Study of Sputtered TiN Gate Electrode Etching with...

A Study of Sputtered TiN Gate Electrode Etching with Various Wet Chemicals and Post Etch Annealing for Complementary Metal–Oxide–Semiconductor Device Integration Applications

Heo, Seung Chan, Yoo, Dongjun, Choi, Moon Suk, Kim, Dohyung, Chung, Chulwon, Choi, Changhwan
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Volume:
51
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.51.101203
Date:
September, 2012
File:
PDF, 1020 KB
english, 2012
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