Radio frequency synchronized triode reactor with a multihole cathode for etching of Si
Djahièche-Nencib, S, Kessi, O, Tadjine, RVolume:
29
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/29/3/060
Date:
March, 1996
File:
PDF, 269 KB
english, 1996