Identification of doping profiles in semiconductor devices

Inverse Problems 2001 / 12 Vol. 17; Iss. 6

Identification of doping profiles in semiconductor devices

Burger, Martin, Engl, Heinz W, Markowich, Peter A, Pietra, Paola
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Volume:
17
Language:
english
Journal:
Inverse Problems
DOI:
10.1088/0266-5611/17/6/315
Date:
December, 2001
File:
PDF, 275 KB
english, 2001
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