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The controlled fabrication of nanopores by focused electron-beam-induced etching
Yemini, M, Hadad, B, Liebes, Y, Goldner, A, Ashkenasy, NVolume:
20
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/20/24/245302
Date:
June, 2009
File:
PDF, 683 KB
english, 2009