MEMS variable optical attenuator using a translation motion of 45° tilted vertical mirror
Kim, Che-Heung, Kim, Yong-KweonVolume:
15
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/15/8/013
Date:
August, 2005
File:
PDF, 1.99 MB
english, 2005